Application No.

No. 10-2016-0086629

Name of Invention

Precursor composition for forming zirconium-containing thin film and method for preparing zirconium-containing thin film using the same.

Application No.

No. 10-2019-0051291

Name of Invention

New silicon precursor compounds and method for fabricating silicon-containing thin film using the same.

Application No.

No. 10-2019-0124471

Name of Invention

Method for manufacturing of alkylaminosilane compound

Application No.

No. 10-2017-0047394

Name of Invention

Preparation of novel tungsten precursor and method of thin film using the same.

Application No.

No. 10-2016-0148313

Name of Invention

Precursor compound for forming tantalum-containing then film and method for preparing tantalum-containing then film using the same.